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Microelectronics Materials and Devices
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Introduction3 Topics
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Crystal Structure17 Topics
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Semiconductor Devices in Microelectronics
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Atom Arrangement (Carbon) vs Material Property
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Crystal Structure and Ordering
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Crystal Structure
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Cubic Lattices
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Derivatives of FCC Lattices
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Hexagonal Lattices
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Cubic Close Packing
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Hexagonal Close Packing
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Atomic Packing Factor
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Planes and Directions
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Directions in Crystal
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Applications of Miller Indices: Si Wafers
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Crystallographic Orientation
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Crystal Plane and Crystal Direction
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Experimental Determination of Crystal Structure & Properties
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Summary and Learning Outcomes
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Semiconductor Devices in Microelectronics
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Energy Bands
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Dielectrics and Other Non-semiconductor Materials
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Semiconductors
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P-N Junctions
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MOS Capacitors
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Metal Semiconductor Contacts
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Types of Solids
Solids are ordered according to 3 types: amorphous, polycrystalline, and single crystal.
Amorphous
Polycrystalline
Crystalline
some short range order, no long range order in the positioning of atoms
>> cheapest
intermediate case with crystalline subsections disjointed or misorientedrelative to each other.
orderly, repeating pattern in 3 dimension within the material, long range ordering
>> expensive
Example:
- Amorphous Si thin film transistors used as switching devices in LCDs
- Polycrystalline Si used as gatein MOSFETs
- Actual active region of MOSFET is fabricated in crystalline Si